专利名称：Fabrication and use of polished silicon micro-mirrors
发明人：Lior Shiv申请号：US11156170申请日：20050617
公开号：US20060283836A1公开日：20061221
专利附图：
摘要：A method of fabricating silicon micro-mirrors includes etching from oppositesides of a silicon wafer with a polished surface on at least one of the opposite sides, toform silicon bars each having a parallelogram-shaped cross-section and including a
portion of the polished surface. At least one of the silicon bars is mounted on a mountingsurface. The polished surface of the silicon bar may be used to reflect optical signals.
申请人：Lior Shiv
地址：Hilleroed DK
国籍：DK
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