专利名称：Voltage detector
发明人：Aoshima, Shinichiro,Tsuchiya,
Yutaka,Takahashi, Hironori
申请号：EP88108711.8申请日：19880531公开号：EP0293841B1公开日：19930120
摘要：A voltage detector detects a voltage developing in a selected area of an objectsuch as an integrated circuit by utilizing an electro-optic material equipped in an opticalprobe. A change in refractive index of the electro-optic material which is caused by thevoltage in the object, is detected as a change of polarization of a light beam passingthrough the electro-optic material. In order to accomplish precise detection of thevoltage, a mirror in the form of a thin metal film or a multilayered dielectric film isdisposed at the tip of electro-optic material and, at the same time, a transparentelectrode is disposed on the side of electro-optic material opposite to the side wherethe mirror is disposed. As a result, lines of electric force produced by the voltagedeveloping in the object are aligned in the electro-optic material parallel to the centerline of the optical probe and the change in refractive index becomes uniform.
申请人：HAMAMATSU PHOTONICS K.K.
地址：1126-1 ICHINO-CHO HAMAMATSU-SHI; SHIZUOKA-KEN
代理机构：Grünecker, Kinkeldey, Stockmair & Schwanhäusser Anwaltssozietät
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