Apparatus for determining the position of a mark o

专利名称：Apparatus for determining the position of a

mark on an object

发明人：Masanori Idesawa,Toyohiko Yatagai申请号：US06/265576申请日：19810520公开号：US04457626A公开日：19840703

摘要：Disclosed is an apparatus for determining the position of a mark on an object tobe determined in terms of configuration, movement or any other geometrical or physicalcondition, using a photosensitive element and a light reflecting body in such acombination that the reflecter intercepts and casts to the photo-sensitive area of theelement the beam of light from the mark, which beam of light would, otherwise, travelapart from the photo-sensitive element, not falling thereon. Thus, the measuring rangeof the photo-sensitive element is apparently extended, or otherwise the accuracy withwhich the mark position is determined is substantially improved.

申请人：RIKAGAKU KENKYUSHO

代理机构：Brumbaugh, Graves, Donohue & Raymond

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