专利名称：Fabrication method for lenses, optical
systems and focusing mirrors bymicromachining
发明人：Bol, Igor I.申请号：EP93300039.0申请日：19930105公开号：EP0552862A1公开日：19930728
专利附图：
摘要：A process for making a micromechanical generally bowl shaped or roundshaped element upon a substrate by providing a member having a generally planarsurface and walls extending from the surface Bumpers are then grown into the walls. Thegenerally round shaped oxide bumpers form a generally bowl shaped convexo-concaverelationship with the walls. The walls are covered on their outer periphery with a materialwhich is resistant to the growth of the bumpers to control the growth of the bumpers at
the periphery of the walls as the bumper is grown into the walls. The final step isremoving either the bumpers from the walls or removing the walls from the bumpersleaving either a generally bowl shaped element or a round shaped element respectivelyon the substrate. In addition the walls may be implanted with a dopant to further controlthe shape of the bumper. When the generally bowl shaped element is made from silicon,it can be utilized as an optical mirror. When the generally round shaped element is madefrom silicon dioxide it can be utilized as a lens.
申请人：XEROX CORPORATION
地址：Xerox Square Rochester New York 14644 US
国籍：US
代理机构：Goode, Ian Roy
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