专利名称：Hard, scratch-resistant coatings for
substrates
发明人：Annette J. Krisko申请号：US09979325申请日：20020306公开号：US06652974B1公开日：20031125
专利附图：
摘要：A transparent, scratch-resistant, amorphous, easily washed coating on atransparent substrate, together with a method for its preparation. A substrate such asglass is introduced into a sputtering chamber, a silicon-containing target is sputtered in
an atmosphere comprising nitrogen and a hydrocarbon gas to produce on the substratea film containing a carbide of silicon and a nitride of silicon. The film preferably has athickness in the range of about 30 Å to about 500 Å, and its surface preferably exhibits acontact angle with water below about 25°. The protective coating may be applied directlyto a transparent substrate such as glass, or may be applied as a protective coating overan optical film stack carried by the substrate. If desired, a glass substrate may be coatedon one side with the optical film stack and coated on the opposite side with theprotective coating.
申请人：CARDINAL IG COMPANY
代理机构：Fredrikson & Byron, P.A.
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